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1
Silicon devices and process integration
deep submicron and nano-scale technologies
Exemplar:
Zentrale: a elt 660 e/465
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2
Introduction to VLSI silicon devices
physics, technology and characterization
Kluwer international series in engineering and computer science ; 10, VLSI, computer architecture and digital signal processing
Exemplar:
Zentrale:Magazinturm-E02 15h elt 697/432
1-2