Albrechtsen, Marcus ;
Vosoughi Lahijani, Babak ;
Christiansen, Rasmus Ellebæk...
Albrechtsen , M , Vosoughi Lahijani , B , Christiansen , R E , Nguyen , V T H , Casses , L N , Hansen , S E , Kristensen , P T , Stenger , N , Sigmund , O , Jansen , H , Mørk , J & Stobbe , S 2021 , ' Shot-filling effects in nanometer-scale electron-beam lithography ' , 47 th Micro and Nano Engineering Conference 2021 , Turin , Italy , 20/09/2021 - 23/09/2021 ..
,
2021