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Murin, D. B.
631  Ergebnisse:
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1

Influence of Mixture Composition on Electrophysical Paramet..:

Pivovarenok, S. A. ; Murin, D. B. ; Grazhdyan, A. Yu.
High Energy Chemistry.  57 (2023)  2 - p. 163-167 , 2023
Link: https://doi.org/10.1134/..
 
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2

Probe and Spectral Diagnostics of the Plasma of the BCl3–Cl..:

Murin, D. B. ; Chesnokov, I. A. ; Gogulev, I. A..
Russian Microelectronics.  52 (2023)  6 - p. 469-474 , 2023
Link: https://doi.org/10.1134/..
 
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3

Influence of Mixture Composition on Electrophysical Paramet..:

Pivovarenok, S. A. ; Murin, D. B. ; Grazhdyan, A. Yu.
High Energy Chemistry.  57 (2023)  2 - p. 151-155 , 2023
Link: https://doi.org/10.1134/..
 
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4

Electrophysical Parameters and Emission Spectra of the Glow..:

Murin, D. B. ; Chesnokov, I. A. ; Gogulev, I. A..
Russian Microelectronics.  52 (2023)  5 - p. 337-343 , 2023
Link: https://doi.org/10.1134/..
 
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5

Electrophysical Characteristics and Emission Spectra of Car..:

Murin, D. B. ; Pivovarenok, S. A. ; Chesnokov, I. A..
Russian Microelectronics.  51 (2022)  6 - p. 368-375 , 2022
Link: https://doi.org/10.1134/..
 
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6

Kinetics of Silicon Etching in Trifluoromethane Plasma:

Pivovarenok, S. A. ; Murin, D. B.
High Energy Chemistry.  56 (2022)  3 - p. 197-200 , 2022
Link: https://doi.org/10.1134/..
 
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7

Plasma-Chemical and Reactive-Ion Etching of Silicon in Tetr..:

Murin, D. B. ; Pivovarenok, S. A. ; Kozin, A. S.
Russian Microelectronics.  51 (2022)  4 - p. 243-246 , 2022
Link: https://doi.org/10.1134/..
 
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8

The Importance of Taking into Account the Heterogeneous Rec..:

Sitanov, D. V. ; Pivovarenok, S. A. ; Murin, D. B.
High Temperature.  60 (2022)  S2 - p. S146-S152 , 2022
Link: https://doi.org/10.1134/..
 
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9

Structuring Silicon in a High-Frequency Discharge of Freon ..:

Dunaev, A. V. ; Murin, D. B.
Russian Microelectronics.  51 (2022)  3 - p. 139-143 , 2022
Link: https://doi.org/10.1134/..
 
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10

Spectral Control of the Process of Copper Etching in Radio ..:

Murin, D. B. ; Pivovarenok, S. A. ; Dunaev, A. V...
Russian Microelectronics.  51 (2022)  6 - p. 359-367 , 2022
Link: https://doi.org/10.1134/..
 
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11

Electrophysical Parameters and Emission Spectra of a DC Glo..:

Murin, D. B. ; Pivovarenok, S. A. ; Malyugin, A. A..
Russian Microelectronics.  51 (2022)  3 - p. 164-169 , 2022
Link: https://doi.org/10.1134/..
 
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12

Effect of a Mixture's Composition on the Electrophysical Pa..:

Pivovarenok, S. A. ; Murin, D. B. ; Sitanov, D. V.
Russian Microelectronics.  50 (2021)  1 - p. 39-44 , 2021
Link: https://doi.org/10.1134/..
 
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13

Kinetics of the Volumetric and Heterogeneous Processes in t..:

Efremov, A. M. ; Murin, D. B. ; Sobolev, A. M..
Russian Microelectronics.  50 (2021)  1 - p. 24-32 , 2021
Link: https://doi.org/10.1134/..
 
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14

Special Aspects of the Kinetics of Reactive Ion Etching of ..:

Efremov, A. M. ; Murin, D. B. ; Betelin, V. B..
Russian Microelectronics.  49 (2020)  2 - p. 94-102 , 2020
Link: https://doi.org/10.1134/..
 
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15

Concerning the Effect of Type of Fluorocarbon Gas on the Ou..:

Efremov, A. M. ; Murin, D. B. ; Kwon, K.-H.
Russian Microelectronics.  49 (2020)  3 - p. 157-165 , 2020
Link: https://doi.org/10.1134/..
 
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