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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
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Study of Tungsten-Doped Carbon Hard Mask Etch Process Using..:
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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
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Line Edge Roughness Reduction in High Aspect Ratio Carbon H..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
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Investigation of High Aspect Ratio Amorphous Carbon Etching..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
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Self-Limited Etching of Silicon Nitride Using Cyclic Proces..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
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Deep trench (DT) etching process for power MOS device:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
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Trimming of Silicon Nitride Hard Mask Using Cyclic Depositi..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
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A Technical Optimization of Waferless Auto Clean for Alumin..:
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2022 China Semiconductor Technology International Conference (CSTIC) ,
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