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Si Lim, Stephanie J.
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A real-time scheduling method for the cluster tool with waf..:

, In: International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
Lim, Si-yeong ; Park, You-jin ; Lee, Hyun.. (2014)  4 - p. 934-946
Copies: Zentrale;
 
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