Pfusterschmied, Georg
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1

Impact of Excess Carbon at the 3C-SiC/SiO2 Interface Using ..:

, In: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS),
 
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2

Impact of Grain Size on The Q-Factor of Poly-Crystalline Di..:

, In: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS),
Huber, Dominik ; Platz, Daniel ; Gesing, Andre... - p. 915-918 , 2024
 
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3

Robust Polycrystalline 3C-Sic-on-Si Heterostructures with L..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
 
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4

Piezoelectric Switching of Bistable MEMS Membranes in Fluid:

, In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS),
 
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5

Sensing Fluid Properties of Super High Viscous Liquids Usin..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
 
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