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Handbook of Silicon Based MEMS Materials and Technologies ,
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Silicon wafer and thin-film measurements:
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Handbook of Silicon Based MEMS Materials and Technologies ,
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Measuring oxygen and bulk microdefects in silicon:
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Handbook of Silicon Based MEMS Materials and Technologies ,
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Silicon Wafer and Thin Film Measurements:
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Handbook of Silicon Based MEMS Materials and Technologies ,
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Oxygen and Bulk Microdefects in Silicon:
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2011 IEEE International Conference of Electron Devices and Solid-State Circuits ,
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Nd-doped Bismuth Titanate based ferroelectric field effect ..:
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Handbook of Silicon Based MEMS Materials and Technologies ,
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Oxygen and Bulk Microdefects in Silicon:
, In:
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Handbook of Silicon Based MEMS Materials and Technologies ,
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