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4
3D Microwave Cavity-Controlled Nanoelectromechanical System
for Cavity Electromechanics and Quantum Sensing
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2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) ,
5
Simulation of Anchor Loss in MEMS Resonators Using Perfectl..:
, In:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
9