Personensuche
X
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
4
High Aspect Ratio Carbon Hard Mask Etch Process for Profile..:
, In:
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
5
Study of Tungsten-Doped Carbon Hard Mask Etch Process Using..:
, In:
?
2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
6
Line Edge Roughness Reduction in High Aspect Ratio Carbon H..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
7
Investigation of High Aspect Ratio Amorphous Carbon Etching..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
8
Deep trench (DT) etching process for power MOS device:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
9
Study of Photo-Resist (PR) Strip Rate with High Temperature..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
10
Trimming of Silicon Nitride Hard Mask Using Cyclic Depositi..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
11
Redistribution Layer aluminum advanced etching process deve..:
, In:
?
2023 China Semiconductor Technology International Conference (CSTIC) ,
12
Carbon Hard Mask Opening Process Development with Novel Sid..:
, In:
?
2022 China Semiconductor Technology International Conference (CSTIC) ,
13
Bitline etch process development for Advanced process DRAM ..:
, In:
?
2022 China Semiconductor Technology International Conference (CSTIC) ,
14