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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) ,
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4 W Dual-Contact Material MEMS Relay with a Contact Force M..:
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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) ,
2
Ultra-Sensitive Strain Sensor Using High Density Self-Align..:
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2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) ,
3