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Suspended Nanochannel Resonators Made by Nanoimprint and Ga..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Muller, Manuel ; Teuber, Jeremy ; Nasri, Rukan... - p. 1041-1044 , 2023
 
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Contributors:

, In: Iberia, Land of Glaciers,
 
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