Aydin, EREN ; GOKCE, Furkan ; Kangul, MUSTAFA.. Aydin E., GOKCE F., Kangul M., ZORLU O., KÜLAH H., "A second harmonic based resonance characterization method for MEMS electrostatic resonators", SENSORS AND ACTUATORS A-PHYSICAL, cilt.274, ss.220-230, 2018.
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2018
Aydin, EREN ; GOKCE, Furkan ; Kangul, MUSTAFA.. Aydin E., GOKCE F., Kangul M., ZORLU O., KÜLAH H., "A second harmonic based resonance characterization method for MEMS electrostatic resonators", SENSORS AND ACTUATORS A-PHYSICAL, cilt.274, ss.220-230, 2018.
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2018
Kangul, Mustafa ; Aydin, Eren ; Gokce, Furkan.. Kangul M., Aydin E., Gokce F., Zorlu O., KÜLAH H., "Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, cilt.26, ss.1272-1278, 2017.
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2017
Gokce, Furkan ; Aydın, Eren ; Kangül, Mustafa... Gokce F., Aydin E., Kangul M., Toral T. B. , Zorlu O., Sardan-Sukas O., KÜLAH H., "A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS", 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Tayvan, 18 - 22 Haziran 2017, ss.1195-1198.
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2017
Gokce, Furkan ; Aydın, Eren ; Kangül, Mustafa... Gokce F., Aydin E., Kangul M., Toral T. B. , Zorlu O., Sardan-Sukas O., KÜLAH H., "A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS", 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Tayvan, 18 - 22 Haziran 2017, ss.1195-1198.
,
2017
Kangul, Mustafa ; Aydin, Eren ; Gokce, Furkan.. Kangul M., Aydin E., Gokce F., Zorlu O., KÜLAH H., "Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, cilt.26, ss.1272-1278, 2017.
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2017