Ekerdt, J. G.
176  Ergebnisse:
Personensuche X
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13

Low-temperature chemical vapor deposition and scaling limit..:

Wang, Q. ; Ekerdt, J. G. ; Gay, D...
Applied Physics Letters.  84 (2004)  8 - p. 1380-1382 , 2004
 
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14

Improved step and flash imprint lithography templates for n..:

Resnick, D.J. ; Mancini, D. ; Dauksher, W.J....
Microelectronic Engineering.  69 (2003)  2-4 - p. 412-419 , 2003
 
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15

Surface chemistry of TaCl5 on polycrystalline Ta:

Lemonds, A.M ; White, J.M ; Ekerdt, J.G
Surface Science.  527 (2003)  1-3 - p. 124-136 , 2003
 
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