Yen-Shou Kuo
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Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis fo..:

Chow, Yu-Ting ; Chao, Shou-Yen ; Jiang, Pei-Cheng...
IEEE Transactions on Semiconductor Manufacturing.  37 (2024)  2 - p. 185-189 , 2024
 
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