Li, Yingying ;
Worsey, Elliott ;
Bleiker, Simon j...
Li , Y , Worsey , E , Bleiker , S J , Edinger , P , Kulsreshath , M K , Tang , Q , Takabayashi , A Y , Quack , N , Verheyen , P , Bogaerts , W , Gylfason , K B , Pamunuwa , D & Niklaus , F 2023 , ' Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process ' , Nanoscale , vol. 15 , no. 43 , pp. 17335-17341 . https://doi.org/10.1039/D3NR03429A.
,
2023