Parsons, Gregory N ;
Elam, Jeffrey W ;
George, Steven M...
Parsons , G N , Elam , J W , George , S M , Haukka , S , Jeon , H , Kessels , W M M , Leskelä , M , Poodt , P , Ritala , M & Rossnagel , S M 2020 , ' Erratum : History of atomic layer deposition and its relationship with the American Vacuum Society (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2013)31 (050818) DOI:10.1116/1.4816548) ' , Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol. 38 , no. 3 , 037001 . https://doi.org/10.1116/6.0000143.
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2020