Messinis, Christos ; van Schaijk, Theodorus T.M ; Pandey, Nitesh... Messinis , C , van Schaijk , T T M , Pandey , N , Koolen , A , Shlesinger , I , Liu , X , Witte , S , Boer , J F D E & Den Boef , A 2021 , ' Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology ' , Optics Express , vol. 29 , no. 23 , pp. 38237-38256 . https://doi.org/10.1364/OE.438026.
,
2021
MESSINIS, CHRISTOS ; VAN SCHAIJK, THEODORUS T.M ; PANDEY, NITESH... MESSINIS , CHRISTOS , VAN SCHAIJK , THEODORUS T M , PANDEY , NITESH , TENNER , VASCO T , WITTE , STEFAN , DE BOER , JOHANNES F & BOEF , ARIE DEN 2020 , ' Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms ' , Optics Express , vol. 28 , no. 25 , pp. 37419-37435 . https://doi.org/10.1364/OE.413020.
,
2020