Gavrilov, N ; Kamenetskikh, A ; Tretnikov, P... Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge / N. Gavrilov, A. Kamenetskikh, P. Tretnikov et al. // Membranes. — 2022. — Vol. 12. — Iss. 1. — 40..
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2022