Versolato, O ;
Bayerle, A ;
Bayraktar, M...
Versolato , O , Bayerle , A , Bayraktar , M , Behnke , L , Bekker , H , Bouza , Z , Colgan , J , Crespo López-Urrutia , J R , Deuzeman , M J , Hoekstra , R , Kurilovich , D , Liu , B , Meijer , R , Neukirch , A , Poirier , L , Rai , S , Ryabtsev , A , Scheers , J , Schupp , R , Sheil , J , Torretti , F , Ubachs , W & Witte , S 2020 , ' Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography ' , Journal of Physics: Conference Series , vol. 1412 , no. 19 , 192006 , pp. 1-1 . https://doi.org/10.1088/1742-6596/1412/19/192006.
,
2020