E-LIB Suche - Ergebnisse für: Beitia, Carlos

1

Metrology for 2D materials: a perspective review from the i..:

Celano, Umberto ; Schmidt, Daniel ; Beitia, Carlos...
Nanoscale Advances. 6 (2024) 9 - p. 2260-2269 , 2024

Link: https://doi.org/10.1039/..

2

Diffusivity and solubility of HF gas in polymers and nanoco..:

Tran, Minh-Phuong ; Beitia, Carlos ; Moon, Sung-In...
Microelectronic Engineering. 267-268 (2023) - p. 111910 , 2023

Link: https://doi.org/10.1016/..

3

Transport Coefficients of Ammonia Gas in Thermoplastic Poly..:

Tran, Minh Phuong ; González-Aguirre, Paola ; Beitia, Carlos...
Diffusion Foundations. 27 (2020) - p. 63-72 , 2020

Link: https://doi.org/10.4028/..

4

Diffusion and Solubility of Common Microelectronic Airborne..:

González-Aguirre, P. ; Tran, Minh Phuong ; Herrán, Fernando...
Defect and Diffusion Forum. 400 (2020) - p. 109-116 , 2020

Link: https://doi.org/10.4028/..

5

Adsorption and desorption kinetics of airborne ammonia on c..:

Tran, Minh-Phuong ; Gonzalez-Aguirre, Paola ; Beitia, Carlos...
Microelectronic Engineering. 230 (2020) - p. 111347 , 2020

Link: https://doi.org/10.1016/..

6

Ammonia sorption outgassing and cross contamination ability..:

González-Aguirre, Paola ; Hérran, Fernando ; Moon, Sung-In...
Microelectronic Engineering. 205 (2019) - p. 53-58 , 2019

Link: https://doi.org/10.1016/..

7

Deposition of hydrogen chloride gas on copper wafer dependi..:

Tran, Minh-Phuong ; Gonzalez-Aguirre, Paola ; Beitia, Carlos...
Microelectronic Engineering. 207 (2019) - p. 1-6 , 2019

Link: https://doi.org/10.1016/..

8

Comparison of HF and HCl cross-contamination between differ..:

Herrán, Fernando ; González-Aguirre, Paola ; Beitia, Carlos...
Microelectronic Engineering. 169 (2017) - p. 34-38 , 2017

Link: https://doi.org/10.1016/..

9

Depth profiling analysis of HfON on SiON ultrathin films by..:

Fauquier, Laurent ; Pelissier, Bernard ; Jalabert, Denis...
Surface and Interface Analysis. 48 (2016) 7 - p. 436-439 , 2016

Link: https://doi.org/10.1002/..

10

A comparative study of the HF sorption and outgassing abili..:

González-Aguirre, Paola ; Fontaine, Hervé ; Beitia, Carlos...
Microelectronic Engineering. 105 (2013) - p. 113-118 , 2013

Link: https://doi.org/10.1016/..

11

Multipolar plasma resonances in supported alkali-metal nano..:

Beitia, Carlos ; Borensztein, Yves ; Barrera, Rubén G..
Physica B: Condensed Matter. 279 (2000) 1-3 - p. 25-28 , 2000

Link: https://doi.org/10.1016/..

12

Adsorption and desorption kinetics of airborne ammonia on c..:

Tran, Minh-Phuong ; Gonzalez-Aguirre, Paola ; Beitia, Carlos...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2020.111347. , 2020

Link: https://hal.science/hal-..

13

Ammonia sorption outgassing and cross contamination ability..:

González-Aguirre, Paola ; Hérran, Fernando ; Moon, Sung-In...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2018.11.012. , 2019

Link: https://hal.archives-ouv..

14

Deposition of hydrogen chloride gas on copper wafer dependi..:

Tran, Minh-Phuong ; Gonzalez-Aguirre, Paola ; Beitia, Carlos...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2019.01.001. , 2019

Link: https://hal.science/hal-..

15

Ammonia sorption outgassing and cross contamination ability..:

González-Aguirre, Paola ; Hérran, Fernando ; Moon, Sung-In...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2018.11.012. , 2019

Link: https://hal.science/hal-..