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Beugin, Virginie
8  Ergebnisse:
Personensuche X
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1

Dielectrics stability for intermediate BEOL in 3D sequentia..:

Deprat, Fabien ; Fenouillet-Beranger, Claire ; Jousseaume, Vincent...
Microelectronic Engineering.  167 (2017)  - p. 90-94 , 2017
Link: https://doi.org/10.1016/..
 
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2

Interface and plasma damage analysis of PEALD TaCN deposite..:

Piallat, Fabien ; Beugin, Virginie ; Gassilloud, Remy...
Applied Surface Science.  303 (2014)  - p. 388-392 , 2014
Link: https://doi.org/10.1016/..
 
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3

Tetragonal Zirconia Stabilization by Metal Addition for Met..:

Ferrand, Julien ; Beugin, Virginie ; Crisci, Alexandre...
ECS Transactions.  58 (2013)  10 - p. 223-233 , 2013
Link: https://doi.org/10.1149/..
 
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4

Evaluation of plasma parameters on PEALD deposited TaCN:

Piallat, Fabien ; Beugin, Virginie ; Gassilloud, Remy...
Microelectronic Engineering.  107 (2013)  - p. 156-160 , 2013
Link: https://doi.org/10.1016/..
 
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5

Evaluation of plasma parameters on PEALD deposited TaCN:

Piallat, Fabien ; Beugin, Virginie ; Gassilloud, Remy...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2012.08.020.  , 2013
Link: https://hal.science/hal-..
 
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6

Evaluation of plasma parameters on PEALD deposited TaCN:

Piallat, Fabien ; Beugin, Virginie ; Gassilloud, Remy...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2012.08.020.  , 2013
Link: https://hal.science/hal-..
 
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7

Evaluation of plasma parameters on PEALD deposited TaCN:

Piallat, Fabien ; Beugin, Virginie ; Gassilloud, Remy...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2012.08.020.  , 2013
Link: https://hal.science/hal-..
 
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8

Evaluation of plasma parameters on PEALD deposited TaCN:

Piallat, Fabien ; Beugin, Virginie ; Gassilloud, Remy...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2012.08.020.  , 2013
Link: https://hal.science/hal-..
 
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