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Bharatan, Prabhakar
2  Ergebnisse:
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In-Situ Post Etch Fluorocarbon Byproduct Removal for HDP Vo..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Bharatan, Prabhakar ; Ye, Jeff J. ; Webb, Brad... - p. 1-5 , 2024
Link: https://doi.org/10.1109/..
 
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Feed-Forward Run-to-Run Process Control Based on Device Arr..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Bharatan, Prabhakar K ; Sellidj, Farid - p. 01-05 , 2024
Link: https://doi.org/10.1109/..
 
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