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Borucki, Leonard J.
34  Ergebnisse:
Personensuche X
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1

Insights into Tungsten Chemical Mechanical Planarization: P..:

Mariscal, Juan Cristobal ; McAllister, Jeffrey ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  8 (2019)  5 - p. P3091-P3097 , 2019
Link: https://doi.org/10.1149/..
 
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2

Effect of Conditioner Type and Downforce, and Pad Surface M..:

McAllister, Jeffrey ; Stuffle, Calliandra ; Sampurno, Yasa...
Micromachines.  10 (2019)  4 - p. 258 , 2019
Link: https://doi.org/10.3390/..
 
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3

Insights into Tungsten Chemical Mechanical Planarization: P..:

Mariscal, Juan Cristobal ; McAllister, Jeffrey ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  8 (2019)  5 - p. P3175-P3184 , 2019
Link: https://doi.org/10.1149/..
 
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4

Insights into Tungsten Chemical Mechanical Planarization: P..:

Mariscal, Juan Cristobal ; McAllister, Jeffrey ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  8 (2019)  5 - p. P3190-P3194 , 2019
Link: https://doi.org/10.1149/..
 
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5

Effect of Conditioning Downforce and Pad Break-In Time on P..:

McAllister, Jeffrey ; Stuffle, Calliandra ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  7 (2018)  5 - p. P274-P280 , 2018
Link: https://doi.org/10.1149/..
 
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6

Effect of CVD-Coated Diamond Discs on Pad Surface Micro-Tex..:

Stuffle, Calliandra ; Han, Ruochen ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  7 (2018)  2 - p. P9-P14 , 2018
Link: https://doi.org/10.1149/..
 
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7

Effect of Conditioner Type and Downforce, and Pad Break-In ..:

McAllister, Jeffrey ; Stuffle, Calliandra ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  7 (2018)  11 - p. P677-P688 , 2018
Link: https://doi.org/10.1149/..
 
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8

Effect of Various Slurry Injection System Configurations on..:

Han, Ruochen ; Sampurno, Yasa ; Bahr, Matthew...
ECS Journal of Solid State Science and Technology.  6 (2017)  7 - p. P449-P454 , 2017
Link: https://doi.org/10.1149/..
 
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9

Effect of Slurry Injection System Position on Removal Rate ..:

Bahr, Matthew ; Sampurno, Yasa ; Han, Ruochen...
ECS Journal of Solid State Science and Technology.  6 (2017)  7 - p. P455-P461 , 2017
Link: https://doi.org/10.1149/..
 
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10

Effect of Conditioning and Slurry Application Method on Sil..:

Han, Ruochen ; Sampurno, Yasa ; Bahr, Matthew..
ECS Journal of Solid State Science and Technology.  6 (2017)  7 - p. P477-P482 , 2017
Link: https://doi.org/10.1149/..
 
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11

Laser Tilt Measurements of a Slurry Injection System:

Borucki, Leonard ; Sampurno, Yasa ; Zhuang, Yun...
ECS Journal of Solid State Science and Technology.  4 (2015)  11 - p. P5021-P5024 , 2015
Link: https://doi.org/10.1149/..
 
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12

Mean Residence Time and Dispersion Number Associated with S..:

Mu, Yan ; Han, Rouchen ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  5 (2015)  3 - p. P155-P159 , 2015
Link: https://doi.org/10.1149/..
 
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13

Effect of pad surface micro-texture on dishing and erosion ..:

Liao, Xiaoyan ; Zhuang, Yun ; Borucki, Leonard J....
Japanese Journal of Applied Physics.  53 (2014)  8 - p. 086501 , 2014
Link: https://doi.org/10.7567/..
 
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14

(Invited) Performance Analysis of a Novel Slurry Injection ..:

Borucki, Leonard ; Zhuang, Yun ; Sampurno, Yasa..
ECS Transactions.  52 (2013)  1 - p. 591-596 , 2013
Link: https://doi.org/10.1149/..
 
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15

Effect of Pad Surface Micro-Texture on Removal Rate during ..:

Liao, Xiaoyan ; Zhuang, Yun ; Borucki, Leonard J....
Japanese Journal of Applied Physics.  52 (2012)  1R - p. 018001 , 2012
Link: https://doi.org/10.7567/..
 
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