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Bosseboeuf, Alain
90  Ergebnisse:
Personensuche X
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1

Zr-Ti getter film integration in MEMS vacuum packaging:

Lemettre, Sylvain ; Bessouet, Clément ; Aassime, Abdelhanin...
Vacuum.  210 (2023)  - p. 111825 , 2023
Link: https://doi.org/10.1016/..
 
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2

One mode-model in nanostructures with inclined sidewalls ap..:

Lackner, Jules ; Fix, Baptiste ; Bosseboeuf, Alain...
EPJ Web of Conferences.  287 (2023)  - p. 04013 , 2023
Link: https://doi.org/10.1051/..
 
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3

Zr-V getter films for MEMS packaging:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Lemettre, Sylvain ; Bessouet, Clement ; Kutyla, Charlotte... - p. 1-4 , 2023
Link: https://doi.org/10.1109/..
 
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4

Hydrogen sorption in yttrium-based getter thin films:

Kutyla, Charlotte ; Bessouet, Clément ; Lemettre, Sylvain...
Vacuum.  207 (2023)  - p. 111655 , 2023
Link: https://doi.org/10.1016/..
 
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5

Optical and Environmental Characterization Bench for 2D Mic..:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Guerreiro, Sara ; Bainschab, Markus ; Piot, Adrien... - p. 1-6 , 2023
Link: https://doi.org/10.1109/..
 
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6

Planar Foucault pendulum silicon gyro:

, In: 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Hudeley, Lucas ; Traon, Olivier Le ; Perrier, Thomas... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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7

Oxygen and hydrogen sorption in thermally activated yttrium..:

, In: 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP),
Kutyla, Charlotte ; Lemettre, Sylvain ; Bessouet, Clement... - p. 1-4 , 2022
Link: https://doi.org/10.1109/..
 
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8

Instrumentation et Interdisciplinarité 

Capteurs Chimiques et Physiques  Intégrations des Savoirs et des Savoir-faire
Jaffrezic-Renault, Nicole ; Agouzoul, Mohamed ; Alhaj, Omar... , [2021]
Link: https://www.degruyter.co..
 
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9

Characterization of Mobility of Charged Dissociated Species..:

, In: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP),
Blanc, Lucas ; Parrain, Fabien ; Chaillot, Agnes... - p. 1-6 , 2020
Link: https://doi.org/10.1109/..
 
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10

Engineering of Micro/Nano Biosystems: Fundamentals & Applic.. 

Microtechnology and MEMS
Barbillon, Gregory ; Bosseboeuf, Alain ; Chun, Kukjin.. - 1st ed. 2020 . , 2020
Link: https://doi.org/10.1007/..
 
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11

In-situ electrical characterization of co-evaporated Zr–Ti,..:

Lemettre, Sylvain ; Hammami, Sana ; Bosseboeuf, Alain..
Microsystem Technologies.  25 (2019)  11 - p. 4091-4096 , 2019
Link: https://doi.org/10.1007/..
 
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12

Introduction:

, In: Engineering of Micro/Nano Biosystems; Microtechnology and MEMS,
Bosseboeuf, Alain ; Chun, Kukjin - p. 1-6 , 2019
Link: https://doi.org/10.1007/..
 
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13

Conclusion:

, In: Engineering of Micro/Nano Biosystems; Microtechnology and MEMS,
Bosseboeuf, Alain ; Chun, Kukjin - p. 363-366 , 2019
Link: https://doi.org/10.1007/..
 
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14

Interference Microscopy Techniques for Microsystem Characte..:

, In: Optical Inspection of Microsystems,
Bosseboeuf, Alain ; Coste, Philippe ; Petitgrand, Sylvain - p. 261-295 , 2019
Link: https://doi.org/10.1201/..
 
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15

Oblique angle deposition of Au/Ti porous getter films:

Wu, Ming ; Moulin, Johan ; Bosseboeuf, Alain
Journal of Applied Physics.  124 (2018)  5 - p. , 2018
Link: https://doi.org/10.1063/..
 
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