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Broas, Mikael
22  Ergebnisse:
Personensuche X
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1

MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulato..:

, In: 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC),
Ross, Glenn ; Luntinen, Ville ; Broas, Mikael... - p. 1-6 , 2020
Link: https://doi.org/10.1109/..
 
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2

List of contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Albert, Stephan Gerhard... - p. xv-xvii , 2020
Link: https://doi.org/10.1016/..
 
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3

In-situ annealing characterization of atomic-layer-deposite..:

Broas, Mikael ; Lemettinen, Jori ; Sajavaara, Timo...
Thin Solid Films.  682 (2019)  - p. 147-155 , 2019
Link: https://doi.org/10.1016/..
 
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4

Corrosion protection of steel with multilayer coatings: Imp..:

Leppäniemi, Jarmo ; Sippola, Perttu ; Broas, Mikael...
Thin Solid Films.  627 (2017)  - p. 59-68 , 2017
Link: https://doi.org/10.1016/..
 
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5

Interfacial void segregation of Cl in Cu-Sn micro-connects:

Ross, Glenn ; Tao, Xiaoma ; Broas, Mikael...
Electronic Materials Letters.  13 (2017)  4 - p. 307-312 , 2017
Link: https://doi.org/10.1007/..
 
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6

Blistering mechanisms of atomic-layer-deposited AlN and Al2..:

Broas, Mikael ; Jiang, Hua ; Graff, Andreas...
Applied Physics Letters.  111 (2017)  14 - p. , 2017
Link: https://doi.org/10.1063/..
 
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7

Thermodynamic reassessment of the Au-Pt-Sn system and micro..:

Dong, Hongqun ; Vuorinen, Vesa ; Broas, Mikael.
Journal of Alloys and Compounds.  688 (2016)  - p. 388-398 , 2016
Link: https://doi.org/10.1016/..
 
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8

Reliability assessment of a MEMS microphone under mixed flo..:

Li, Jue ; Broas, Mikael ; Raami, Jani..
Microelectronics Reliability.  54 (2014)  6-7 - p. 1228-1234 , 2014
Link: https://doi.org/10.1016/..
 
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9

MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulato..:

Ross, Glenn ; Luntinen, Ville ; Broas, Mikael...
Electronics System-Integration Technology Conference.  , 2020
Link: https://aaltodoc.aalto.f..
 
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10

In-situ annealing characterization of atomic-layer-deposite..:

Broas, Mikael ; Lemettinen, Jori ; Sajavaara, Timo...
Thin Solid Films.  , 2019
Link: http://urn.fi/URN:NBN:fi..
 
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11

In-situ annealing characterization of atomic-layer-deposite..:

Broas, Mikael ; Lemettinen, Jori ; Sajavaara, Timo...
Thin Solid Films.  , 2019
Link: https://aaltodoc.aalto.f..
 
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12

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/..:

Rontu, Ville ; Sippola, Perttu ; Broas, Mikael...
Journal of Vacuum Science and Technology A.  , 2018
Link: http://urn.fi/URN:NBN:fi..
 
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13

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/..:

Rontu, Ville ; Sippola, Perttu ; Broas, Mikael...
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A.  , 2018
Link: https://aaltodoc.aalto.f..
 
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14

Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Pr..:

Broas, Mikael ; Kanninen, Olli ; Vuorinen, Vesa..
ACS Omega.  , 2017
Link: https://aaltodoc.aalto.f..
 
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15

Corrosion protection of steel with multilayer coatings: Imp..:

Leppäniemi, Jarmo ; Sippola, Perttu ; Broas, Mikael...
Thin Solid Films.  , 2017
Link: https://aaltodoc.aalto.f..
 
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