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CHEVOLLEAU, Thierry
52  Ergebnisse:
Personensuche X
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1

Area selective deposition using alternate deposition and et..:

Bonvalot, Marceline ; Vallée, Christophe ; Mannequin, Cédric...
Dalton Transactions.  51 (2022)  2 - p. 442-450 , 2022
Link: https://doi.org/10.1039/..
 
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2

DNA Origami for Silicon Patterning:

Thomas, Guillaume ; Diagne, Cheikh Tidiane ; Baillin, Xavier...
ACS Applied Materials & Interfaces.  12 (2020)  32 - p. 36799-36809 , 2020
Link: https://doi.org/10.1021/..
 
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3

Interaction Plasma/Dielectric:

, In: Plasma Etching Processes for Interconnect Realization in VLSI,
Posseme, Nicolas ; Darnon, Maxime ; Chevolleau, Thierry. - p. 15-43 , 2015
Link: https://doi.org/10.1016/..
 
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4

Porous SiOCH Film Integration:

, In: Plasma Etching Processes for Interconnect Realization in VLSI,
Posseme, Nicolas ; Darnon, Maxime ; David, Thibaut. - p. 45-76 , 2015
Link: https://doi.org/10.1016/..
 
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5

List of Authors:

, In: Plasma Etching Processes for Interconnect Realization in VLSI,
Chevolleau, Thierry ; Darnon, Maxime ; David, Thibaut. - p. 105 , 2015
Link: https://doi.org/10.1016/..
 
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6

Comparative Study on Dry Etching of α- and β-SiC Nano-Pilla..:

Choi, J.H. ; Latu-Romain, Laurence ; Bano, Edwige...
Materials Science Forum.  740-742 (2013)  - p. 817-820 , 2013
Link: https://doi.org/10.4028/..
 
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7

MAM 2012 (selected contributions) March 11–14, Grenoble, Fr..:

MAITREJEAN, Sylvain ; FARCY, Alexis ; CHEVOLLEAU, Thierry
Microelectronic Engineering.  107 (2013)  - p. 59-60 , 2013
Link: https://doi.org/10.1016/..
 
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8

Fabrication of SiC Nanopillars by Inductively Coupled SF6/O..:

Choi, Ji Hoon ; Latu-Romain, Laurence ; Dhalluin, Florian...
Materials Science Forum.  711 (2012)  - p. 66-69 , 2012
Link: https://doi.org/10.4028/..
 
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9

Hexagonal Faceted SiC Nanopillars Fabricated by Inductively..:

Choi, J.H. ; Latu-Romain, Laurence ; Baron, Thierry..
Materials Science Forum.  717-720 (2012)  - p. 893-896 , 2012
Link: https://doi.org/10.4028/..
 
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10

Innovative Gap-Fill Strategy for 28 nm Shallow Trench Isola..:

Tavernier, Aurélien ; Favennec, Laurent ; Chevolleau, Thierry.
ECS Transactions.  45 (2012)  3 - p. 225-232 , 2012
Link: https://doi.org/10.1149/..
 
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11

Patterning Strategy for Monoelectronic Device Platform in a..:

Pauliac-Vaujour, Sebastien ; Wacquez, Romain ; Vizioz, Christian...
Japanese Journal of Applied Physics.  50 (2011)  6S - p. 06GF15 , 2011
Link: https://doi.org/10.1143/..
 
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12

Study of Porous SiOCH Patterning Using Metallic Hard Mask: ..:

Posseme, Nicolas ; David, Thibaut ; Chevolleau, Thierry...
ECS Transactions.  35 (2011)  4 - p. 667-685 , 2011
Link: https://doi.org/10.1149/..
 
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13

Patterning Strategy for Monoelectronic Device Platform in a..:

Pauliac-Vaujour, Sebastien ; Wacquez, Romain ; Vizioz, Christian...
Japanese Journal of Applied Physics.  50 (2011)  6S - p. 06GF15 , 2011
Link: https://doi.org/10.7567/..
 
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14

Porous SiOCH Integration: Etch Challenges with a Trench Fir..:

Possémé, Nicolas ; David, Thibaut ; Chevolleau, Thierry...
ECS Transactions.  34 (2011)  1 - p. 389-394 , 2011
Link: https://doi.org/10.1149/..
 
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15

Development of Porosimetry Techniques for the Characterizat..:

Licitra, Christophe ; Chevolleau, Thierry ; Bouyssou, Regis...
ECS Transactions.  35 (2011)  4 - p. 729-746 , 2011
Link: https://doi.org/10.1149/..
 
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