Chekurov, N.
18  Ergebnisse:
Personensuche X
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1

Sensitivity-improved silicon cantilever microphone for acou..:

Sievilä, P. ; Chekurov, N. ; Raittila, J..
Sensors and Actuators A: Physical.  190 (2013)  - p. 90-95 , 2013
 
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2

Design and fabrication of a tuning fork shaped voltage cont..:

Gronicz, J ; Chekurov, N ; Kosunen, M.
Journal of Micromechanics and Microengineering.  23 (2013)  11 - p. 115004 , 2013
 
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3

Ion-beam assisted self-assembly of metallic nanostructures:

Chalapat, K. ; Chekurov, N. ; Li, J..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  272 (2012)  - p. 202-205 , 2012
 
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6

Dry fabrication of microdevices by the combination of focus..:

Chekurov, N ; Grigoras, K ; Sainiemi, L...
Journal of Micromechanics and Microengineering.  20 (2010)  8 - p. 085009 , 2010
 
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7

Fabrication and characterization of an ultrasensitive acous..:

Sievilä, P ; Rytkönen, V-P ; Hahtela, O...
Journal of Micromechanics and Microengineering.  17 (2007)  5 - p. 852-859 , 2007
 
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8

Atomic layer deposited alumina (Al2O3) thin films on a high..:

Hahtela, O ; Sievilä, P ; Chekurov, N.
Journal of Micromechanics and Microengineering.  17 (2007)  4 - p. 737-742 , 2007
 
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9

Atomic layer deposition enhanced rapid dry fabrication of m..:

Chekurov, N ; Koskenvuori, M ; Airaksinen, V-M.
Journal of Micromechanics and Microengineering.  17 (2007)  8 - p. 1731-1736 , 2007
 
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10

Non-tilting out-of-plane mode high-Qmechanical silicon osci..:

Hahtela, O ; Chekurov, N ; Tittonen, I
Journal of Micromechanics and Microengineering.  15 (2005)  10 - p. 1848-1853 , 2005
 
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