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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
1
Advanced BEOL process integration for logic technology node:
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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
2
Extreamly Advanced Cu Interconnect with Selective ALD Barri..:
, In:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
3
Galvanic Corrosion Effect of Co Liner on ALD TaN Barrier:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
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