E-LIB Suche - Ergebnisse für: Chung, Chin-Wook

1

Generation of high-density plasma via transparent electrode..:

Moon, Ho-Jun ; Jung, Jiwon ; Park, Junyoung.
Plasma Sources Science and Technology. , 2024

2

Effect of aluminum content on plasma resistance and contami..:

So, Jongho ; Choi, Eunmi ; Kim, Minjoong...
Materials Science in Semiconductor Processing. 170 (2024) - p. 107981 , 2024

Link: https://doi.org/10.1016/..

3

A harmonic method for measuring electron temperature and io..:

Eo, Hyundong ; Park, Sung Joon ; Kim, Ju Ho.
Plasma Sources Science and Technology. 33 (2024) 2 - p. 025028 , 2024

Link: https://doi.org/10.1088/..

4

Investigation of contamination particles generation and sur..:

So, Jongho ; Kim, Minjoong ; Kwon, Hyuksung...
Applied Surface Science. 629 (2023) - p. 157367 , 2023

Link: https://doi.org/10.1016/..

5

Reduced amount of contamination particle generated by CF4/A..:

Kim, Minjoong ; Choi, Eunmi ; So, Jongho...
Materials Science in Semiconductor Processing. 167 (2023) - p. 107809 , 2023

Link: https://doi.org/10.1016/..

6

Effect of parallel resonance on the electron energy distrib..:

HE, You ; LIM, Yeong-Min ; LEE, Jun-Ho...
Plasma Science and Technology. 25 (2023) 4 - p. 045401 , 2023

Link: https://doi.org/10.1088/..

7

Two-dimensional measurements of the ELM filament using a mu..:

Hong, Young-Hun ; Kim, Kwan-Yong ; Kim, Ju-Ho...
Nuclear Engineering and Technology. 54 (2022) 10 - p. 3717-3723 , 2022

Link: https://doi.org/10.1016/..

8

Correlation of SiO2 etch rate in CF4 plasma with electrical..:

Lee, Nayeon ; Lee, Woohyun ; Kwon, Ohyung.
Journal of Physics D: Applied Physics. 55 (2022) 37 - p. 375204 , 2022

Link: https://doi.org/10.1088/..

9

Simultaneous measurements of plasma parameters and blob cha..:

Kim, Kwan-Yong ; Son, Soo-Hyun ; Hong, Suk-Ho...
Fusion Engineering and Design. 172 (2021) - p. 112900 , 2021

Link: https://doi.org/10.1016/..

10

Control of the spatial distribution of ion flux in dual ind..:

Cho, Sung-Won ; Moon, Jun-Hyeon ; Zhang, Aixian.
Journal of Applied Physics. 129 (2021) 10 - p. , 2021

Link: https://doi.org/10.1063/..

11

Improvement of corrosion properties of plasma in an aluminu..:

Kim, Minjoong ; Choi, Eunmi ; So, Jongho...
Journal of Materials Research and Technology. 11 (2021) - p. 219-226 , 2021

Link: https://doi.org/10.1016/..

12

A wafer-like apparatus for two-dimensional measurement of p..:

Lim, Yeong-Min ; Eo, Hyundong ; Kim, Kyung-Hyun..
Review of Scientific Instruments. 92 (2021) 5 - p. , 2021

Link: https://doi.org/10.1063/..

13

Improvement of Plasma Resistance of Anodic Aluminum-Oxide F..:

So, Jongho ; Choi, Eunmi ; Kim, Jin-Tae...
Coatings. 10 (2020) 2 - p. 103 , 2020

Link: https://doi.org/10.3390/..

14

Electron energy distribution modification by RF bias in Ar/..:

Lee, Hyo-Chang ; Chung, Chin-Wook ; Kim, J. H..
Applied Physics Letters. 115 (2019) 6 - p. , 2019

Link: https://doi.org/10.1063/..

15

Degradation Test for an Anodic Aluminum Oxide Film in Plasm..:

Lee, Seung-Su ; Kim, Min-Joong ; Chung, Chin-Wook...
Journal of the Korean Physical Society. 74 (2019) 11 - p. 1046-1051 , 2019

Link: https://doi.org/10.3938/..