E-LIB Suche - Ergebnisse für: Dai, Zhong-Ling

1

Discharge mode and particle transport in radio frequency ca..:

Gao, Zhuo-Yao ; Dong, Wan ; Tian, Chong-Biao...
Chinese Physics B. , 2024

Link: https://doi.org/10.1088/..

2

Effect of reactant transport on the trench profile evolutio..:

Zhang, Sai-Qian ; Dai, Zhong-Ling ; Song, Yuan-Hong.
Vacuum. 99 (2014) - p. 180-188 , 2014

Link: https://doi.org/10.1016/..

3

Study on feature profile evolution for chlorine etching of ..:

Dai, Zhong-Ling ; Zhang, Sai-Qian ; Wang, You-Nian
Vacuum. 89 (2013) - p. 197-202 , 2013

Link: https://doi.org/10.1016/..

4

Study on mechanism of etching in low pressure radio-frequen..:

Dai, Zhong-Ling ; Yue, Guang ; Wang, You-Nian
Current Applied Physics. 11 (2011) 5 - p. S121-S125 , 2011

Link: https://doi.org/10.1016/..

5

Nonlinear Plasma Dynamics in Electron Heating of Asymmetric..:

Dai, Zhong-Ling ; Wang, You-Nian
Chinese Physics Letters. 28 (2011) 7 - p. 075202 , 2011

Link: https://doi.org/10.1088/..

6

Numerical results for the Ar and CF4 mixture gas in a dual ..:

Bi, Zhen-Hua ; Dai, Zhong-Ling ; Xu, Xiang..
Physics of Plasmas. 16 (2009) 4 - p. , 2009

Link: https://doi.org/10.1063/..

7

Heating mechanisms and particle flow balancing of capacitiv..:

Jiang, Wei ; Xu, Xiang ; Dai, Zhong-Ling.
Physics of Plasmas. 15 (2008) 3 - p. , 2008

Link: https://doi.org/10.1063/..

8

Simulations of ion transport in a collisional radio-frequen..:

Dai, Zhong-Ling ; Wang, You-Nian
Physical Review E. 69 (2004) 3 - p. , 2004

Link: https://doi.org/10.1103/..

9

Comparison between characteristics of radio-frequency sheat..:

Dai, Zhong-Ling ; Wang, You-Nian
Surface and Coatings Technology. 165 (2003) 3 - p. 224-231 , 2003

Link: https://doi.org/10.1016/..

10

Dynamic sheath model at pulsed-biased insulating substrates:

Dai, Zhong-Ling ; Wang, You-Nian
Journal of Applied Physics. 92 (2002) 11 - p. 6428-6433 , 2002

Link: https://doi.org/10.1063/..

11

Simulation of Dual Frequency Capacitive Sheath over a Conca..:

Mei-Lan, Hao ; Zhong-Ling, Dai ; You-Nian, Wang
Chinese Physics Letters. 26 (2009) 12 - p. 125202 , 2009

Link: https://doi.org/10.1088/..

12

Comparison between Dual Radio Frequency- and Pulse-Driven S..:

Zhong-Ling, Dai ; Chuan-Sheng, Liu ; You-Nian, Wang
Chinese Physics Letters. 25 (2008) 2 - p. 632-635 , 2008

Link: https://doi.org/10.1088/..

13

Dust Particle Properties in a Dual-Frequency Driven Sheath:

Yu, Liu ; Zhong-Ling, Dai ; You-Nian, Wang
Chinese Physics Letters. 25 (2008) 4 - p. 1372-1375 , 2008

Link: https://doi.org/10.1088/..

14

RF electric field penetration and power deposition into non..:

Ming, Mao ; Shuai, Wang ; Zhong-Ling, Dai.
Chinese Physics. 16 (2007) 7 - p. 2044-2050 , 2007

Link: https://doi.org/10.1088/..

15

Investigation of Dual Radio-Frequency Driven Sheaths and Io..:

Li-Hong, Wang ; Zhong-Ling, Dai ; You-Nian, Wang
Chinese Physics Letters. 23 (2006) 3 - p. 668-671 , 2006

Link: https://doi.org/10.1088/..