De Pastina, Annalisa
16  Ergebnisse:
Personensuche X
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Vertical etching of Al0.7Sc0.3N for next generation of acou..:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
 
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Suspended micro/nano channel resonators: a review:

De Pastina, Annalisa ; Villanueva, Luis Guillermo
Journal of Micromechanics and Microengineering.  30 (2020)  4 - p. 043001 , 2020
 
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Mechanics for Fluidics and Bio-Devices:

, In: Engineering of Micro/Nano Biosystems; Microtechnology and MEMS,
 
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