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Eichler, Marko
22  Ergebnisse:
Personensuche X
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1

Parametric studies on droplet generation reproducibility fo..:

Wiedemeier, Stefan ; Eichler, Marko ; Römer, Robert...
Engineering in Life Sciences.  17 (2017)  12 - p. 1271-1280 , 2017
Link: https://doi.org/10.1002/..
 
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2

Control of Direct Bonding Behavior by Interlayers:

Eichler, Marko ; Dillmann, Helena ; Nagel, Krees.
ECS Transactions.  75 (2016)  9 - p. 137-144 , 2016
Link: https://doi.org/10.1149/..
 
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3

Surface Preparation and Eutectic Wafer Bonding:

Heller, Martin ; Zoberbier, Margarete ; Fujita, Toma.
ECS Transactions.  75 (2016)  9 - p. 229-239 , 2016
Link: https://doi.org/10.1149/..
 
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4

Temporary Wafer Bonding by Polyelectrolyte Interlayers:

Eichler, Marko ; Dillmann, Helena ; Reim, Leo Clemens..
ECS Transactions.  64 (2014)  5 - p. 179-186 , 2014
Link: https://doi.org/10.1149/..
 
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5

(Invited) Plasma Activation as a Pretreatment Tool for Low-..:

Eichler, Marko ; Hennecke, Philipp ; Nagel, Krees..
ECS Transactions.  50 (2013)  7 - p. 265-276 , 2013
Link: https://doi.org/10.1149/..
 
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6

Area‐Selective Microplasma Treatment in Microfluidic Channe..:

Eichler, Marko ; Nagel, Krees ; Hennecke, Philipp.
Plasma Processes and Polymers.  9 (2012)  11-12 - p. 1160-1167 , 2012
Link: https://doi.org/10.1002/..
 
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7

Plasma Process. Polym. 11–12/2012:

Thomas, Michael ; Borris, Jochen ; Dohse, Antje...
Plasma Processes and Polymers.  9 (2012)  11-12 - p. , 2012
Link: https://doi.org/10.1002/..
 
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8

Plasma Printing and Related Techniques – Patterning of Surf..:

Thomas, Michael ; Borris, Jochen ; Dohse, Antje...
Plasma Processes and Polymers.  9 (2012)  11-12 - p. 1086-1103 , 2012
Link: https://doi.org/10.1002/..
 
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9

Super-Low-Temperature-Bonding für die Mikrosystemtechnik (.. 

Schlussbericht ; Laufzeit des Vorhabens: 1.10.2007 - 31.12.... 
Eichler, Marko , 2011
Link: http://edok01.tib.uni-ha..
 
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10

Low-Temperature Direct Bonding of Borosilicate, Fused Silic..:

Eichler, Marko ; Michel, Benedikt ; Hennecke, Philipp..
ECS Transactions.  33 (2010)  4 - p. 339-348 , 2010
Link: https://doi.org/10.1149/..
 
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11

Einsatz von Mikroplasmen für die Herstellung von Silizium‐M..:

Eichler, Marko ; Michel, Benedikt ; Gabriel, Markus.
Vakuum in Forschung und Praxis.  21 (2009)  4 - p. 6-9 , 2009
Link: https://doi.org/10.1002/..
 
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12

Or0504–Investigations on the Effect of Dielectric Barrier D..:

Michel, Benedikt ; Eichler, Marko ; Klages, Claus‐Peter
Plasma Processes and Polymers.  6 (2009)  S1 - p. , 2009
Link: https://doi.org/10.1002/..
 
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13

Kinetics of Silanol Condensation for Low-Temperature Direct..:

Eichler, Marko ; Michel, Benedikt ; Thomas, Michael.
ECS Transactions.  16 (2008)  8 - p. 369-376 , 2008
Link: https://doi.org/10.1149/..
 
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14

Konditionierung von Wafern mittels Dielektrischer Barrieren.. 

Abschlussbericht ; [Zeitraum: 01.11.2004 - 28.02.2007] 
Eichler, Marko ; Nommensen, Peter , [2007]
Link: http://edok01.tib.uni-ha..
 
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15

Surface Technology with Cold Microplasmas:

Klages, Claus‐Peter ; Hinze, Alena ; Lachmann, Kristina...
Plasma Processes and Polymers.  4 (2007)  3 - p. 208-218 , 2007
Link: https://doi.org/10.1002/..
 
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