Figueiredo, Silvania Pereira
112  Ergebnisse:
Personensuche X
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9

Investigation of coherent Fourier scatterometry as a calibr..:

Paul, Anubhav ; Rafighdoost, Jila ; Dou, Xiujie.
Measurement Science and Technology.  35 (2024)  7 - p. 075202 , 2024
 
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10

Coherent Fourier Scatterometry for Detection of Killer Defe..:

Rafighdoost, Jila ; Kolenov, Dmytro ; Pereira, Silvania F.
IEEE Transactions on Semiconductor Manufacturing.  37 (2024)  1 - p. 124-128 , 2024
 
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11

Optical and tactile measurements on SiC sample defects:

Grundmann, Jana ; Bodermann, Bernd ; Ermilova, Elena...
Journal of Sensors and Sensor Systems.  13 (2024)  1 - p. 109-121 , 2024
 
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