Gielissen, K ; Sidelnikov, Y ; Glushkov, D... Gielissen , K , Sidelnikov , Y , Glushkov , D , Soer , W A , Banine , V Y & Mullen, van der , J J A M 2010 , ' Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma ' , Journal of Applied Physics , vol. 107 , no. 1 , 013301 , pp. 013301-1/7 . https://doi.org/10.1063/1.3268462.
,
2010
Gielissen, K Gielissen , K 2009 , ' The nature and characteristics of particles produced by EUV sources : exploration, prevention and mitigation ' , Doctor of Philosophy , Applied Physics , Eindhoven . https://doi.org/10.6100/IR653353.
,
2009
Gielissen, K ; Sidelnikov, Y ; Glushkov, D... Gielissen , K , Sidelnikov , Y , Glushkov , D , Soer , W A , Banine , V Y & Mullen, van der , J J A M 2009 , ' Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation ' , Journal of Applied Physics , vol. 106 , no. 8 , 083301 , pp. 083301-1/6 . https://doi.org/10.1063/1.3239994.
,
2009