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Gosalvez, Miguel A.
76  Ergebnisse:
Personensuche X
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1

Generalized damage profile function for subsurface damage i..:

Chen, Qianhuang ; Gosalvez, Miguel A. ; Li, Qi..
Materials Science in Semiconductor Processing.  173 (2024)  - p. 108104 , 2024
Link: https://doi.org/10.1016/..
 
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2

Helium focused ion beam induced subsurface damage on Si and..:

Chen, Qianhuang ; Gosalvez, Miguel A. ; Li, Qi.
Journal of Materials Research and Technology.  24 (2023)  - p. 3363-3382 , 2023
Link: https://doi.org/10.1016/..
 
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3

Etch and growth rates of GaN for surface orientations in th..:

Guo, Xinyan ; Gosalvez, Miguel.A. ; Xing, Yan.
Materials Science in Semiconductor Processing.  153 (2023)  - p. 107173 , 2023
Link: https://doi.org/10.1016/..
 
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4

Evolutionary Kinetic Monte Carlo Simulation of Anisotropic ..:

Wu, Guorong ; Gosalvez, Miguel A. ; Xing, Yan
Journal of Microelectromechanical Systems.  31 (2022)  2 - p. 249-264 , 2022
Link: https://doi.org/10.1109/..
 
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5

Characterization of anisotropic wet etching of single-cryst..:

Xing, Yan ; Guo, Zhiyue ; Gosálvez, Miguel A...
Sensors and Actuators A: Physical.  303 (2020)  - p. 111667 , 2020
Link: https://doi.org/10.1016/..
 
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6

Multiscale Analysis of Phase Transformations in Self-Assemb..:

Procházka, Pavel ; Gosalvez, Miguel A. ; Kormoš, Lukáš...
ACS Nano.  14 (2020)  6 - p. 7269-7279 , 2020
Link: https://doi.org/10.1021/..
 
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7

Dominant contributions to the apparent activation energy in..:

Alberdi-Rodriguez, Joseba ; Acharya, Shree Ram ; Rahman, Talat S..
Journal of Physics: Condensed Matter.  32 (2020)  44 - p. 445002 , 2020
Link: https://doi.org/10.1088/..
 
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8

List of contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Albert, Stephan Gerhard... - p. xv-xvii , 2020
Link: https://doi.org/10.1016/..
 
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9

Simulation-based optimization of out-of-plane, variable-hei..:

Xing, Yan ; Qian, Jin ; Gosálvez, Miguel A...
Microelectronic Engineering.  231 (2020)  - p. 111375 , 2020
Link: https://doi.org/10.1016/..
 
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10

Level Set Simulation of Surface Evolution in Anisotropic We..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Zhang, Jie ; Xing, Yan ; Gosalvez, Miguel A.... - p. 361-364 , 2019
Link: https://doi.org/10.1109/..
 
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11

Microscopic Origin of the Apparent Activation Energy in Dif..:

Gosálvez, Miguel A. ; Alberdi-Rodriguez, Joseba
The Journal of Physical Chemistry C.  121 (2017)  37 - p. 20315-20322 , 2017
Link: https://doi.org/10.1021/..
 
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12

Kinetic Monte Carlo method for the simulation of anisotropi..:

Zhang, Hui ; Xing, Yan ; Li, Yuan..
Sensors and Actuators A: Physical.  256 (2017)  - p. 24-34 , 2017
Link: https://doi.org/10.1016/..
 
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13

Erratum: Anisotropic etching on Si{1 1 0}: experiment and s..:

Pal, Prem ; Gosalvez, Miguel A ; Sato, Kazuo..
Journal of Micromechanics and Microengineering.  25 (2015)  4 - p. 049601 , 2015
Link: https://doi.org/10.1088/..
 
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14

List of Contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Amiotti, Marco... - p. xiii-xv , 2015
Link: https://doi.org/10.1016/..
 
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15

Modeling of Silicon Etching:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Gosálvez, Miguel A. - p. 333-353 , 2015
Link: https://doi.org/10.1016/..
 
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