E-LIB Suche - Ergebnisse für: Harada, Tetsuo

1

EUV durability of CNT pellicles for next-generation scanner:

Ueda, Takahiro ; Lima, Marcio D. ; Harada, Tetsuo..
Japanese Journal of Applied Physics. 63 (2024) 3 - p. 03SP57 , 2024

2

Fundamental Evaluation of KrF Resist Changing Formulation b..:

Ohta, Yosuke ; Sekiguchi, Atsushi ; Yamakawa, Shinji...
Journal of Photopolymer Science and Technology. 37 (2024) 1 - p. 89-93 , 2024

Link: https://doi.org/10.2494/..

3

The Photopolymer Science and Technology Award:

Nakamoto, Atsunori ; Yamakawa, Shinji ; Harada, Tetsuo.
Journal of Photopolymer Science and Technology. 36 (2023) 1 - p. 7-10 , 2023

Link: https://doi.org/10.2494/..

4

Characterization of Photoacid Generator Bound Resist with X..:

Yamakawa, Shinji ; Harada, Tetsuo ; Nakanishi, Koji.
Journal of Photopolymer Science and Technology. 36 (2023) 1 - p. 47-52 , 2023

Link: https://doi.org/10.2494/..

5

Spatial Distribution Analysis of Polymers in Resist Thin Fi..:

Nakamoto, Atsunori ; Yamakawa, Shinji ; Harada, Tetsuo.
Journal of Photopolymer Science and Technology. 36 (2023) 1 - p. 41-45 , 2023

Link: https://doi.org/10.2494/..

6

CNT-based pellicles for the next generation of EUV scanners:

Ueda, Takahiro ; Lima, Marcio D. ; Harada, Tetsuo.
Japanese Journal of Applied Physics. 62 (2023) SG - p. SG0805 , 2023

Link: https://doi.org/10.35848..

7

Spatial Distribution Imaging of Resist Thin Film with Micro..:

Iguchi, Shuhei ; Harada, Tetsuo ; Yamakawa, Shinji..
Journal of Photopolymer Science and Technology. 36 (2023) 1 - p. 25-30 , 2023

Link: https://doi.org/10.2494/..

8

Present Status of EUV Interference Lithography at NewSUBARU:

Imai, Rikuya ; Yamakawa, Shinji ; Harada, Tetsuo.
Journal of Photopolymer Science and Technology. 36 (2023) 1 - p. 53-59 , 2023

Link: https://doi.org/10.2494/..

9

Comparison of Photoresist Sensitivity between KrF, EB and E..:

Ohta, Yosuke ; Sekiguchi, Atsushi ; Yamakawa, Shinji...
Journal of Photopolymer Science and Technology. 35 (2022) 1 - p. 49-54 , 2022

Link: https://doi.org/10.2494/..

10

Grazing-Incidence Soft-X-ray Scattering for the Chemical St..:

Nakamoto, Atsunori ; Yamakawa, Shinji ; Harada, Tetsuo.
Journal of Photopolymer Science and Technology. 35 (2022) 1 - p. 61-65 , 2022

Link: https://doi.org/10.2494/..

11

Neighborhood-level socioeconomic factors moderate the assoc..:

Mori, Takaaki ; Aoki, Takumi ; Oishi, Kan...
BMC Public Health. 22 (2022) 1 - p. , 2022

Link: https://doi.org/10.1186/..

12

Association of Neighborhood Food Environment and Physical A..:

Oishi, Kan ; Aoki, Takumi ; Harada, Tetsuo...
INQUIRY: The Journal of Health Care Organization, Provision, and Financing. 58 (2021) - p. 004695802110556 , 2021

Link: https://doi.org/10.1177/..

13

The Measurement of the Refractive Index n and k Value of th..:

Ohta, Yosuke ; Sekiguchi, Atsushi ; Harada, Tetsuo.
Journal of Photopolymer Science and Technology. 34 (2021) 1 - p. 105-110 , 2021

Link: https://doi.org/10.2494/..

14

Development of a high-power EUV irradiation tool in a hydro..:

Harada, Tetsuo ; Yamakawa, Shinji ; Toyoda, Mitsunori.
Japanese Journal of Applied Physics. 60 (2021) 8 - p. 087005 , 2021

Link: https://doi.org/10.35848..

15

Modified-edge-support heat treatment method of polyimide fo..:

Murashima, Kensuke ; Kawashima, Yuki ; Ozaki, Shuhei...
Carbon. 181 (2021) - p. 348-357 , 2021

Link: https://doi.org/10.1016/..