Harnisch, Gerd
5  Ergebnisse:
Personensuche X
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3

Electrostatic chuck for EUV masks:

Kalkowski, Gerhard ; Risse, Stefan ; Müller, Sandra.
Microelectronic Engineering.  83 (2006)  4-9 - p. 714-717 , 2006
 
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4

Proceedings of the Fourteenth International Congress of Lin.. 

Berlin, GDR, August 10 - August 15, 1987 : Volume 3  Proceedings of the Fourteenth International Congress of Linguists ; Volume 3
Albrecht, Erhard ; Albrecht, Klaus ; Alexejew, M.... - Reprint 2021 . , 2022
 
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