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Defects in thin amorphous Si films deposited with and witho..:

Hoedemaker, Marije ; van der Kuur, Jan ; Melker, Ernst Jan.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 127-128 (1997) - p. 888-892 , 1997

Link: https://doi.org/10.1016/..

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