Hoye, R.L.Z ; Muñoz-Rojas, D ; Nelson, S.F... Hoye , R L Z , Muñoz-Rojas , D , Nelson , S F , Illiberi , A , Poodt , P , Roozeboom , F & MacManus-Driscoll , J L 2015 , ' Research update : Atmospheric pressure spatial atomic layer deposition of ZnO thin films : reactors, doping and devices ' , APL Materials , vol. 3 , no. 4 , pp. 040701- . https://doi.org/10.1063/1.4916525.
,
2015