E-LIB Suche - Ergebnisse für: Jang, Yunchang

1

Observation of the floating sheath distribution on Al2O3 an..:

Bae, Namjae ; Kim, Nam-Kyun ; Lee, Haneul...
Current Applied Physics. 61 (2024) - p. 19-24 , 2024

Link: https://doi.org/10.1016/..

2

Investigation of ion-induced etch damages on trench surface..:

Song, Jaemin ; Lee, Myeonggeon ; Ryu, Sangwon...
Current Applied Physics. 45 (2023) - p. 105-113 , 2023

Link: https://doi.org/10.1016/..

3

Plasma information-based virtual metrology (PI-VM) and mass..:

Park, Seolhye ; Seong, Jaegu ; Jang, Yunchang...
Journal of the Korean Physical Society. 80 (2022) 8 - p. 647-669 , 2022

Link: https://doi.org/10.1007/..

4

Development of Virtual Metrology Using Plasma Information V..:

Kwon, Ji-Won ; Ryu, Sangwon ; Park, Jihoon...
Materials. 14 (2021) 11 - p. 3005 , 2021

Link: https://doi.org/10.3390/..

5

Characterization of Coupling Coefficient for Transformer Mo..:

, In: 2020 IEEE International Conference on Plasma Science (ICOPS),

Lee, Haneul ; Jang, Yunchang ; Lee, Myeong-Geon... - p. 344-344 , 2020

Link: https://doi.org/10.1109/..

6

Characteristics of a plasma information variable in phenome..:

Jang, Yunchang ; Roh, Hyun-Joon ; Park, Seolhye...
Current Applied Physics. 19 (2019) 10 - p. 1068-1075 , 2019

Link: https://doi.org/10.1016/..

7

Cause analysis of the faults in HARC etching processes by u..:

Park, Seolhye ; Kyung, Yunyoung ; Lee, Juyoung...
Plasma Processes and Polymers. 16 (2019) 9 - p. , 2019

Link: https://doi.org/10.1002/..

8

Optical diagnostics for the highly populated tail of an ele..:

Roh, Hyun-Joon ; Kim, Nam-Kyun ; Ryu, Sangwon..
Journal of Physics D: Applied Physics. 50 (2017) 22 - p. 225201 , 2017

Link: https://doi.org/10.1088/..

9

Vacuum pump age effects by the exposure to the corrosive ga..:

Park, Seolhye ; Roh, Hyun-Joon ; Jang, Yunchang...
Thin Solid Films. 603 (2016) - p. 154-159 , 2016

Link: https://doi.org/10.1016/..

10

Observation of oversaturation-induced defect formation in t..:

Jin, Younggil ; Song, Jae-Min ; Roh, Ki-Baek...
Journal of the Korean Physical Society. 69 (2016) 4 - p. 518-524 , 2016

Link: https://doi.org/10.3938/..

11

Characterization of Two–Radio-Frequency–Driven Dual Antenna..:

Huh, Sung-Ryul ; Kim, Nam-Kyun ; Jang, Yun-Chang..
Fusion Science and Technology. 68 (2015) 1 - p. 105-112 , 2015

Link: https://doi.org/10.13182..

12

Real- time Etch Control to Reduce First Wafer Effect in SF6..:

Ryu, Sangwon ; Jang, Yunchang ; Kwon, Ji-Won...
2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM), p. 8651157. , 2022

Link: https://hdl.handle.net/1..

13

Investigation of ion-induced etch damages on trench surface..:

Song, Jaemin ; Lee, Myeonggeon ; Ryu, Sangwon...
Current Applied Physics, Vol.45, pp.105-113. , 2022

Link: https://hdl.handle.net/1..

14

Plasma information-based virtual metrology (PI-VM) and mass..:

Park, Seolhye ; Seong, Jaegu ; Jang, Yunchang...
Journal of the Korean Physical Society, Vol.80 No.8, pp.647-669. , 2022

Link: https://hdl.handle.net/1..

15

Development of Virtual Metrology Using Plasma Information V..:

Kwon, Ji-Won ; Ryu, Sangwon ; Park, Jihoon...
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8199536/. , 2021

Link: http://www.ncbi.nlm.nih...