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2022 China Semiconductor Technology International Conference (CSTIC) ,
3
Exploration and Optimization of Metal Gate Etch Back Proces..:
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2020 China Semiconductor Technology International Conference (CSTIC) ,
10
Well CD Control and Vertical Profile BARC Etch Development ..:
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Springer Series in Geomechanics and Geoengineering; Proceedings of the International Field Exploration and Development Conference 2023 ,
14