Ich stimme zu, dass diese Seite Cookies verwende. Weitere Informationen finden Sie unter unseren Datenschutzerklärungen .
X
Katoh, Takeo
255  Ergebnisse:
Personensuche X
?
1

Dependence of Non-Prestonian Behavior of Ceria Slurry with ..:

Kang, Hyun-Goo ; Kim, Dae-Hyeong ; Katoh, Takeo...
Japanese Journal of Applied Physics.  45 (2006)  5R - p. 3896 , 2006
Link: https://doi.org/10.1143/..
 
?
2

The Effect of the physico-chemical properties of cellulosic..:

Kim, Sang-Kyun ; Kim, Ye-Hwan ; Paik, Ungyu..
Journal of Electroceramics.  17 (2006)  2-4 - p. 835-839 , 2006
Link: https://doi.org/10.1007/..
 
?
3

Effects of Abrasive Size and Surfactant Concentration on th..:

Kang, Hyun-Goo ; Katoh, Takeo ; Park, Hyung-Soon..
Japanese Journal of Applied Physics.  44 (2005)  1L - p. L136 , 2005
Link: https://doi.org/10.1143/..
 
?
4

Effect of Dispersant Addition during Ceria Abrasive Milling..:

Kang, Hyun-Goo ; Katoh, Takeo ; Kim, Dae-Hyung..
Japanese Journal of Applied Physics.  44 (2005)  1L - p. L238 , 2005
Link: https://doi.org/10.1143/..
 
?
5

A Reverse Selectivity Ceria Slurry for the Damascene Gate C..:

Kim, Sang-Kyun ; Sohn, Hyung-Min ; Paik, Ungyu..
Japanese Journal of Applied Physics.  43 (2004)  11A - p. 7434-7438 , 2004
Link: https://doi.org/10.1143/..
 
?
6

Effects of Grain Size and Abrasive Size of Polycrystalline ..:

Kang, Hyun-Goo ; Katoh, Takeo ; Kim, Sung-Jun...
Japanese Journal of Applied Physics.  43 (2004)  3A - p. L365-L368 , 2004
Link: https://doi.org/10.1143/..
 
?
7

Effect of Molecular Weight of Surfactant in Nano Ceria Slur..:

Kang, Hyun-Goo ; Katoh, Takeo ; Lee, Myung-Yoon...
Japanese Journal of Applied Physics.  43 (2004)  8B - p. L1060 , 2004
Link: https://doi.org/10.1143/..
 
?
8

Influence of Physical Characteristics of Ceria Particles on..:

Kim, Sang-Kyun ; Yoon, Phil-Won ; Paik, Ungyu..
Japanese Journal of Applied Physics.  43 (2004)  11A - p. 7427-7433 , 2004
Link: https://doi.org/10.1143/..
 
?
9

Nanotopography impact in shallow-trench isolation chemical ..:

Park, Jea-Gun ; Katoh, Takeo ; Paik, Ungyu
Journal of Materials Research.  19 (2004)  6 - p. 1783-1790 , 2004
Link: https://doi.org/10.1557/..
 
?
10

Nanotopography Impact and Non-Prestonian Behavior of Ceria ..:

Katoh, Takeo ; Kim, Min-Seok ; Paik, Ungyu.
Japanese Journal of Applied Physics.  43 (2004)  2A - p. L217-L220 , 2004
Link: https://doi.org/10.1143/..
 
?
11

Dependence of Nanotopography Impact on Abrasive Size and Su..:

Kang, Hyun-Goo ; Katoh, Takeo ; Lee, Won-Mo..
Japanese Journal of Applied Physics.  43 (2003)  1A/B - p. L1-L4 , 2003
Link: https://doi.org/10.1143/..
 
?
12

Effects of the Physical Characteristics of Cerium Oxide on ..:

Kim, Sang-Kyun ; Paik, Ungyu ; Oh, Seong-Geun...
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 3 - p. 1227-1230 , 2003
Link: https://doi.org/10.1143/..
 
?
13

Effects of Abrasive Morphology and Surfactant Concentration..:

Katoh, Takeo ; Kang, Hyun-Goo ; Paik, Ungyu.
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 3 - p. 1150-1153 , 2003
Link: https://doi.org/10.1143/..
 
?
14

Effect of Slurry Surfactant on Nanotopography Impact in Che..:

Katoh, Takeo ; Kim, Sung-Jun ; Paik, Ungyu.
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 9A - p. 5430-5432 , 2003
Link: https://doi.org/10.1143/..
 
?
15

Surfactant Effect on Oxide-to-Nitride Removal Selectivity o..:

Park, Jea-Gun ; Katoh, Takeo ; Lee, Won-Mo..
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 9A - p. 5420-5425 , 2003
Link: https://doi.org/10.1143/..
 
1-15