Khanna, Aniruddh ( author )
10  Ergebnisse:
Personensuche X
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2

High-Performance Pad Conditioning (HPPC) Arm for Augmenting..:

Khanna, Aniruddh J. ; Kakireddy, Veera Raghava ; Fung, Jason...
ECS Journal of Solid State Science and Technology.  9 (2020)  6 - p. 064012 , 2020
 
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3

Engineering Surface Texture of Pads for Improving CMP Perfo..:

Khanna, Aniruddh J. ; Kakireddy, Veera Raghava ; Fung, Jason...
ECS Journal of Solid State Science and Technology.  9 (2020)  10 - p. 104003 , 2020
 
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4

Investigation of the Impact of Pad Surface Texture from Dif..:

Khanna, Aniruddh J. ; Yamamura, Mayu ; Kakireddy, Veera Raghava...
ECS Journal of Solid State Science and Technology.  9 (2020)  6 - p. 064011 , 2020
 
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5

Impact of Pad Material Properties on CMP Performance for Su..:

Khanna, Aniruddh J. ; Kakireddy, Raghava ; Jawali, Puneet...
ECS Journal of Solid State Science and Technology.  8 (2019)  5 - p. P3063-P3068 , 2019
 
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6

Method for Determining Stability of CMP Slurry:

Khanna, Aniruddh J. ; Gupta, Sushant ; Kumar, Purushottam..
ECS Journal of Solid State Science and Technology.  7 (2018)  8 - p. P423-P428 , 2018
 
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7

Study of Agglomeration Behavior of Chemical Mechanical Poli..:

J. Khanna, Aniruddh ; Gupta, Sushant ; Kumar, Purushottam..
ECS Journal of Solid State Science and Technology.  7 (2018)  5 - p. P238-P242 , 2018
 
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8

Mn-Doped Zn2SiO4 Phosphors Synthesis Using Flame Spray Pyro..:

Lee, Jae Seok ; Oh, Myoung Hwan ; Kumar, Purushottam...
Journal of Thermal Spray Technology.  20 (2011)  5 - p. 1001-1008 , 2011
 
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9

Microlens Array Fabrication by Chemical Mechanical Polishin:

Kumar, Purushottam ; Son, Seung-Young ; Lee, Jaeseok...
Electrochemical and Solid-State Letters.  12 (2009)  7 - p. H269 , 2009
 
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