Kim, Woo-Kyu
39015  Ergebnisse:
Personensuche X
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1

Leaching Phenomena and their Suppresion in 193 nm Immersion..:

Dammel, Ralph R. ; Pawlowski, Georg ; Romano, Andrew...
Journal of Photopolymer Science and Technology.  18 (2005)  5 - p. 593-602 , 2005
 
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2

193 nm Resist Line Collapse Study by Modifying the Resist P..:

Tanaka, Keiichi ; Yamada, Yoshiaki ; Masuda, Seiya...
Journal of Photopolymer Science and Technology.  17 (2004)  4 - p. 527-534 , 2004
 
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3

Influence of ArF Resist Components and Process Conditions o..:

Padmanaban, Munirathna ; Anyadiegwu, Clement ; Kanda, Takashi...
Journal of Photopolymer Science and Technology.  16 (2003)  4 - p. 475-481 , 2003
 
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4

Optimization of 193 nm Contact Hole Resists for 100 nm Node:

Kudo, Takanori ; Alemy, Eric L. ; Dammel, Ralph R....
Journal of Photopolymer Science and Technology.  15 (2002)  4 - p. 549-558 , 2002
 
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5

Etch Properties of 193nm Resists: Issues and Approaches:

Padmanaban, Munirathna ; Alemy, Eric ; Dammel, Ralph...
Journal of Photopolymer Science and Technology.  15 (2002)  3 - p. 521-527 , 2002
 
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7

Mechanistic Studies on the CD Degradation of 193nm Resists ..:

Kudo, Takanori ; Dammel, Ralph R. ; Bae, Jun-Born...
Journal of Photopolymer Science and Technology.  14 (2001)  3 - p. 407-417 , 2001
 
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8

Materials and Resists for 193 and 157nm Applications:

Padmanaban, Munirathna ; Alemy, Eric ; Bae, Jun-Bom...
Journal of Photopolymer Science and Technology.  14 (2001)  4 - p. 631-642 , 2001
 
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9

Layer-Specific Resists for 193nm Lithography:

Padmanaban, Munirathna ; Bae, Jun-Bom ; Kim, Woo-Kyu...
Journal of Photopolymer Science and Technology.  13 (2000)  4 - p. 607-615 , 2000
 
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10

Sensitized Transparent Photobase Additive For 193 nm Lithog..:

Padmanaban, Munirathna ; Bae, Jun-Born ; Cook, Michelle...
Journal of Photopolymer Science and Technology.  13 (2000)  4 - p. 617-624 , 2000
 
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13

Complex Electro-Optic Frequency-Response Characterization o..:

, In: 2024 IEEE Silicon Photonics Conference (SiPhotonics),
Jo, Youngkwan ; Ji, Yongjin ; Kim, Hyun-Kyu... - p. 1-2 , 2024
 
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15

Using Benthic Indices to Assess the Ecological Quality of S..:

Liang, Jian ; Shu, Meng-Yuan ; Huang, Hai-Rui..
Journal of Marine Science and Engineering.  12 (2024)  3 - p. 487 , 2024
 
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