Seunghee Lee (77594) ; Miso Kim (773939) ; Geumbi Mun (3138111)... https://figshare.com/articles/journal_contribution/Effects_of_Al_Precursors_on_the_Characteristics_of_Indium_Aluminum_Oxide_Semiconductor_Grown_by_Plasma-Enhanced_Atomic_Layer_Deposition/16437236.
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2021