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2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) ,
1
A Gold Proof-Mass Differential MEMS Accelerometer for Micro..:
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2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) ,
2
A 100-nG/√ Hz-Level Single Au Proof-Mass 3-Axis MEMS Accele..:
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2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) ,
3
Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Ca..:
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2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) ,
4
A 3-D Parallel-Plate MEMS Accelerometer with a Gold Proof M..:
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2019 IEEE Biomedical Circuits and Systems Conference (BioCAS) ,
6