Kumasaka, Fumiaki
17  Ergebnisse:
Personensuche X
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6

Microstructure and Dielectric Properties of Composite Films..:

Imanaka, Yoshihiko ; Amada, Hideyuki ; Kumasaka, Fumiaki
International Journal of Applied Ceramic Technology.  8 (2011)  3 - p. 653-657 , 2011
 
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8

High-Performance X-Ray Mask Fabrication Using TaGeN Absorbe..:

Iba, Yoshihisa ; Taguchi, Takao ; Iizuka, Takashi...
Japanese Journal of Applied Physics.  40 (2001)  4B - p. L410 , 2001
 
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10

Sub-100-nm Device Fabrication using Proximity X-Ray Lithogr..:

Iba, Yoshihisa ; Taguchi, Takao ; Kumasaka, Fumiaki...
Japanese Journal of Applied Physics.  39 (2000)  12S - p. 6952 , 2000
 
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13

Pattern Etching of Ta X-ray Mask Absorber on SiC Membrane b..:

Iba, Yoshihisa ; Kumasaka, Fumiaki ; Aoyama, Hajime..
Japanese Journal of Applied Physics.  37 (1998)  7A - p. L824 , 1998
 
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14

Precise Stress Control of Ta Absorber using Low Stress Alum..:

Iba, Yoshihisa ; Kumasaka, Fumiaki ; Aoyama, Hajime..
Japanese Journal of Applied Physics.  35 (1996)  12S - p. 6463 , 1996
 
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