Kwok, Chee Yee
1011  Ergebnisse:
Personensuche X
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2

Parallel in-Plane Electrothermal Actuators:

Ho, Yen Nee ; Michael, Aron ; Kwok, Chee Yee.
Journal of Microelectromechanical Systems.  33 (2024)  3 - p. 305-307 , 2024
 
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5

Study and Application of In-Situ Phosphorus Doped Thick Pol..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Chaung, Ian ; Michael, Aron ; Kwok, Chee Yee - p. 299-302 , 2019
 
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8

Fabrication of nano-scale high aspect ratio ultra sharp tip..:

, In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
Wang, Peng ; Michael, Aron ; Chen, Ssu Han.. - p. 1328-1331 , 2017
 
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10

Monolithically integrated out-of-plane micro-mirror:

Michael, Aron ; Kwok, Chee Yee
Sensors and Actuators A: Physical.  179 (2012)  - p. 263-276 , 2012
 
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11

Deposition and characterization of thick graded index SixOy..:

Michael, Aron ; Hafiz, Abdullah Al ; Puzzer, Tom.
Sensors and Actuators A: Physical.  178 (2012)  - p. 110-117 , 2012
 
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13

Formation of ultra-smooth 45° micromirror on (100) silicon ..:

Xu, Yi Wei ; Michael, Aron ; Kwok, Chee Yee
Sensors and Actuators A: Physical.  166 (2011)  1 - p. 164-171 , 2011
 
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15

Thermo-mechanical behavior of buckled multi-layered micro-b..:

Michael, Aron ; Kwok, Chee Yee
Sensors and Actuators A: Physical.  137 (2007)  1 - p. 157-168 , 2007
 
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