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2022 International Workshop on Advanced Patterning Solutions (IWAPS) ,
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Frequency doubling and resolution enhancement technique exp..:
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2022 International Workshop on Advanced Patterning Solutions (IWAPS) ,
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Frame mark selection, placement, design and simulation:
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2022 International Workshop on Advanced Patterning Solutions (IWAPS) ,
5
Resolution improvement review for the immersion lithography:
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2020 International Workshop on Advanced Patterning Solutions (IWAPS) ,
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OPO Measurement Improvement in Advanced DRAM with Tunable W..:
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2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) ,
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