Laus, Michele
255  Ergebnisse:
Personensuche X
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6

Phosphorus activation in silicon: To deglaze or not to degl..:

Barin, Gianluca ; Seguini, Gabriele ; Chiarcos, Riccardo...
Materials Science in Semiconductor Processing.  165 (2023)  - p. 107691 , 2023
 
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8

Doping of silicon by phosphorus end-terminated polymers: sh..:

, In: 2023 21st International Workshop on Junction Technology (IWJT),
 
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10

Electrical characterization of thin silicon-on-insulator fi..:

Pulici, Andrea ; Kuschlan, Stefano ; Seguini, Gabriele...
Materials Science in Semiconductor Processing.  163 (2023)  - p. 107548 , 2023
 
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12

Periodic Arrays of Dopants in Silicon by Ultralow Energy Im..:

Kuschlan, Stefano ; Chiarcos, Riccardo ; Laus, Michele...
ACS Applied Materials & Interfaces.  15 (2023)  50 - p. 57928-57940 , 2023
 
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